Fundamental Principles of Optical Lithography

€59,95
2 in stock

Chris A. Mack, Chris Mack

544 psl.

2007 m.

Minkštas viršelis

Barcode: 9780470727300

Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.

View details